MF153000 - SEMI MF1530 - Test Method for Measuring Flatness, Thickness, and Total Thickness Variation on Silicon Wafers by Automated Noncontact Scanning Revision:SEMI MF1530-0707 - Superseded The specific purpose of this

The specific purpose of this Specification is to describe a network-independent application model comprised of device objects which are common to all vacuum pump devices (VPD) on a semiconductor equipment Sensor/Actuator Communications Network

this Standard is intended to achieve

outside of a data collection plan

B：形状測定を使用した段差法

a piece of equipment can be seen as a mechanical entity in the factory which plays a role in the manufacturing process

MF153000 - SEMI MF1530 - Test Method for Measuring Flatness, Thickness, and Total Thickness Variation on Silicon Wafers by Automated Noncontact Scanning Revision:SEMI MF1530-0707 - Superseded The specific purpose of this1 Purpose 1. 1 Flatness, thickness and thickness variation are vital factors affecting the yield of semiconductor device processing. 1. 2 Knowledge of these characteristics can help the producer and consumer determine if the dimensional characteristics of a specimen wafer satisfy given geometrical requirements. 1. 3 This Test Method is suitable for measuring the flatness and thickness of wafers used in semiconductor device processing in the as sliced,